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Anisotropic etching of silicon in hydrazine

✍ Scribed by M.A. Gajda; H. Ahmed; J.E.A. Shaw; A. Putnis

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 788 KB
Volume: 40
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(94)87009-8

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