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Development of perfect silicon corrugated diaphragm using anisotropic etching

✍ Scribed by Norhayati Soin; B.Y. Majlis

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 163 KB
Volume: 83
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2006.01.084

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