✦ LIBER ✦
Fabrication of silicon vertical taper structures using KOH anisotropic etching
✍ Scribed by Roman Holly; Kurt Hingerl
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 220 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.