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The fabrication and use of micromachined corrugated silicon diaphragms

✍ Scribed by J.H. Jerman

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 648 KB
Volume: 23
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(90)87074-s

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