✦ LIBER ✦
Reliability and yield in fabrication of microcantilever structures using bulk silicon micromachining
✍ Scribed by A. Rawicz; M. Parameswaran; J.M. Chen
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 333 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0026-2714
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