Fabrication and dynamic testing of electrostatic actuators with p+ silicon diaphragms

✍ Scribed by E.H. Yang; S.S. Yang; S.W. Han; S.Y. Kim

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 602 KB
• Volume: 50
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(96)80100-2

✦ Synopsis

This paper presents the fabrication and testing of electrostatic actuators with (\mathrm{p}^{+})diaphragms. The actuators consist of two counter electrodes which are fabricated on a silicon wafer and Pyrex glass, respectively. The (\mathrm{p}^{+})diaphragm is used as a moving electrode, whereas the aluminium layer deposited on #7740 Pyrex glass is used as a fixed electrode. According to the calculation of static deflection of diaphragms with residual tensile stress, corrugated diaphragms deflect more than a flat one in most deflection regions. The dynamic characteristics of an actuator with a corrugated diaphragm and one with a flat diaphragm are tested and compared with the calculation results.