Dry release fabrication and testing of SiC electrostatic cantilever actuators

Fabrication and dynamic testing of elect

Fabrication and dynamic testing of electrostatic actuators with p+ silicon diaphragms

✍ E.H. Yang; S.S. Yang; S.W. Han; S.Y. Kim 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 602 KB

This paper presents the fabrication and testing of electrostatic actuators with \(\mathrm{p}^{+}\)diaphragms. The actuators consist of two counter electrodes which are fabricated on a silicon wafer and Pyrex glass, respectively. The \(\mathrm{p}^{+}\)diaphragm is used as a moving electrode, whereas