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The fabrication of tem grids with silicon micromachining

✍ Scribed by F. Enquist; A. Spetz; M. Armgarth

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 96 KB
Volume: 17
Category: Article
ISSN: 0304-3991
DOI: 10.1016/0304-3991(85)90035-x

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