✦ LIBER ✦
A batch-fabricated non-reverse valve with cantilever beam manufactured by micromachining of silicon
✍ Scribed by J. Tirén; L. Tenerz; B. Hök
- Publisher
- Elsevier Science
- Year
- 1989
- Weight
- 585 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0250-6874
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