The application of excimer laser micromachining for the fabrication of disc microelectrodes

✍ Scribed by B.J. Seddon; Y. Shao; J. Fost; H.H. Giraults

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 563 KB
• Volume: 39
• Category: Article
• ISSN: 0013-4686
• DOI: 10.1016/0013-4686(93)e0038-n

✦ Synopsis

Abstnet-A method is presented for the fabrication of carbon ink microelectrodes in a composite membrane or thin laminate arrangement . The scheme utilises uv excimer laser photoablation of nanosecond pulse duration at wavelength 248 am to generate the required micro-hole structure in 12pm PET film . At laser fluences of the order of LOmJcm -r , film ablation rates were controlled to OApm per pulse without thermal deformation of the micro-hole. From a micro-hole template a thick film printing technique is used to produce carbon ink microelectrodes with an inlaid disc geometry . A series of microelectrode devices were constructed by this process with disc diameters ranging from 38pm down to 7pm with fabrication precision to I Am. The amperometric response of the film based microelectrodes were characterized using standard electrochemical measurements and examined by SEM and optical microscopy. Applications are proposed for the new device in the assembly of electrochemical transducers for environmental or clinical sensors.