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Excimer laser machining for the fabrication of analogous microstructures

✍ Scribed by K. Zimmer; D. Hirsch; F. Bigl

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 415 KB
Volume: 96-98
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(95)00498-x

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