Design and performance of an excimer-laser based optical system for high precision microstructuring

✍ Scribed by K.-H. Gerlach; J. Jersch; K. Dickmann; L.J. Hildenhagen

• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 866 KB
• Volume: 29
• Category: Article
• ISSN: 0030-3992
• DOI: 10.1016/s0030-3992(97)00049-2

✦ Synopsis

We report on the design of an excimer-laser based system for high precision micromachining of spinnerets using a mask imaging technique. Both the illumination and imaging unit are optimized for specified demagnification ratios of 5 and 15, respectively. Detailed investigations were performed to measure the resolution, depth of focus and the sensitivity for the position accuracy of the substrate depending on illumination parameters. A special test mask for measuring the resolution in combination with a new definition of measurement procedure is used. SEM views of ablation results with high machining quality are presented.