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The application of laser photochemical techniques to microcircuit fabrication

โœ Scribed by AE Adams; ML Lloyd


Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
285 KB
Volume
35
Category
Article
ISSN
0042-207X

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Abstnet-A method is presented for the fabrication of carbon ink microelectrodes in a composite membrane or thin laminate arrangement . The scheme utilises uv excimer laser photoablation of nanosecond pulse duration at wavelength 248 am to generate the required micro-hole structure in 12pm PET film .