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Application of wet chemical selective etch techniques to the fabrication of thin silicon detectors

✍ Scribed by B. Schmidt; J. von Borany; D. Schubert

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 407 KB
Volume: 326
Category: Article
ISSN: 0168-9002
DOI: 10.1016/0168-9002(93)90328-f

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