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Anisotropic etching of silicon in TMAH solutions

✍ Scribed by Osamu Tabata; Ryouji Asahi; Hirofumi Funabashi; Keiichi Shimaoka; Susumu Sugiyama

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 415 KB
Volume: 34
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(92)80139-t

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