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Catalytic control of anisotropic silicon etching

✍ Scribed by Harold G. Linde; Larry W. Austin

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 404 KB
Volume: 49
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(95)01019-x

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