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Influence of electric field on laser damage properties of DLC films by unbalanced magnetron sputtering

✍ Scribed by Xu, Junqi; Su, Junhong; Hang, Lingxia; Cheng, Yaojin


Book ID
118415773
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
519 KB
Volume
265
Category
Article
ISSN
0169-4332

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Emission properties of Ti-DLC films prep
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The field emission properties of Ti-DLC films in diode and coplanar device structures were studied. An emission current density of 1.14 A/cm 2 could be obtained at an applied field of 33 V/mm and the threshold field was 24 V/mm for the coplanar emission structure. The silicon substrate was found to