Piezoresistive properties and structure of hydrogen-free DLC films deposited by DC and pulsed-DC unbalanced magnetron sputtering

✍ Scribed by Š. Meškinis; A. Vasiliauskas; K. Šlapikas; R. Gudaitis; S. Tamulevičius; G. Niaura

• Book ID: 119374145
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 439 KB
• Volume: 211
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2011.10.004