✦ LIBER ✦

In situ Reaction Mechanism Studies on Atomic Layer Deposition of Ir and IrO 2 from Ir(acac) 3

✍ Scribed by Knapas, Kjell; Ritala, Mikko

Book ID: 121306946
Publisher: American Chemical Society
Year: 2011
Tongue: English
Weight: 849 KB
Volume: 23
Category: Article
ISSN: 0897-4756
DOI: 10.1021/cm103490v

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Atomic Layer Deposition of Iridium Oxide

Atomic Layer Deposition of Iridium Oxide Thin Films from Ir(acac) 3 and Ozone

✍ Hämäläinen, Jani; Kemell, Marianna; Munnik, Frans; Kreissig, Ulrich; Ritala, Mik 📂 Article 📅 2008 🏛 American Chemical Society 🌐 English ⚖ 583 KB

In Situ Reaction Mechanism Studies on th

In Situ Reaction Mechanism Studies on the Atomic Layer Deposition of Al 2 O 3 from (CH 3 ) 2 AlCl and Water

✍ Matero, Raija; Rahtu, Antti; Ritala, Mikko 📂 Article 📅 2005 🏛 American Chemical Society 🌐 English ⚖ 121 KB

In Situ Reaction Mechanism Studies on Oz

In Situ Reaction Mechanism Studies on Ozone-Based Atomic Layer Deposition of Al 2 O 3 and HfO 2

✍ Rose, Martin; Niinistö, Jaakko; Endler, Ingolf; Bartha, Johann W.; Kücher, Pet 📂 Article 📅 2010 🏛 American Chemical Society 🌐 English ⚖ 318 KB

In Situ Reaction Mechanism Studies on At

In Situ Reaction Mechanism Studies on Atomic Layer Deposition of Sb 2 Te 3 and GeTe from (Et 3 Si) 2 Te and Chlorides

✍ Knapas, Kjell; Hatanpää, Timo; Ritala, Mikko; Leskelä, Markku 📂 Article 📅 2010 🏛 American Chemical Society 🌐 English ⚖ 814 KB

In situ reaction mechanism studies of pl

In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al[sub 2]O[sub 3]

✍ Heil, S. B. S.; Kudlacek, P.; Langereis, E.; Engeln, R.; van de Sanden, M. C. M. 📂 Article 📅 2006 🏛 American Institute of Physics 🌐 English ⚖ 415 KB

In Situ Reaction Mechanism Studies on At

In Situ Reaction Mechanism Studies on Atomic Layer Deposition of ZrO 2 from (CpMe) 2 Zr(OMe)Me and Water or Ozone

✍ Knapas, Kjell; Ritala, Mikko 📂 Article 📅 2008 🏛 American Chemical Society 🌐 English ⚖ 156 KB