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In Situ Reaction Mechanism Studies on Atomic Layer Deposition of Sb 2 Te 3 and GeTe from (Et 3 Si) 2 Te and Chlorides

✍ Scribed by Knapas, Kjell; Hatanpää, Timo; Ritala, Mikko; Leskelä, Markku

No coin nor oath required. For personal study only.

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