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In situ reaction mechanism studies on the Ti(NMe2)2(OiPr)2-D2O and Ti(OiPr)3[MeC(NiPr)2]-D2O atomic layer deposition processes

✍ Scribed by Tomczak, Yoann; Knapas, Kjell; Leskelä, Markku; Ritala, Mikko

No coin nor oath required. For personal study only.

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