✦ LIBER ✦
In Situ Reaction Mechanism Studies on the New t BuN=M(NEt 2 ) 3 -Water and t BuN=M(NEt 2 ) 3 - Ozone (M = Nb,Ta) Atomic Layer Deposition Processes
✍ Scribed by Tomczak, Yoann; Knapas, Kjell; Sundberg, Markku; Leskelä, Markku; Ritala, Mikko
- Book ID
- 126860393
- Publisher
- American Chemical Society
- Year
- 2012
- Tongue
- English
- Weight
- 955 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0897-4756
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