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Atomic Layer Deposition of Iridium Oxide Thin Films from Ir(acac) 3 and Ozone

✍ Scribed by Hämäläinen, Jani; Kemell, Marianna; Munnik, Frans; Kreissig, Ulrich; Ritala, Mikko; Leskelä, Markku

No coin nor oath required. For personal study only.

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