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Atomic Layer Deposition of Titanium Dioxide Thin Films from Cp*Ti(OMe) 3 and Ozone

✍ Scribed by Rose, Martin; Niinistö, Jaakko; Michalowski, Pawel; Gerlich, Lukas; Wilde, Lutz; Endler, Ingolf; Bartha, Johann W.

No coin nor oath required. For personal study only.

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