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Atomic layer deposition of the titanium dioxide thin film from tetraethoxytitanium and water

✍ Scribed by A. P. Alekhin; G. I. Lapushkin; A. M. Markeev; A. A. Sigarev; V. F. Toknova


Book ID
111460581
Publisher
Springer
Year
2010
Tongue
English
Weight
747 KB
Volume
80
Category
Article
ISSN
1070-3632

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