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Atomic layer deposition of thin films of titanium dioxide from titanium tetramethoxide and water

✍ Scribed by A. P. Alekhin, A. M. Markeev, D. V. Ovchinnikov…


Book ID
120767690
Publisher
SP MAIK Nauka/Interperiodica
Year
2013
Tongue
English
Weight
593 KB
Volume
86
Category
Article
ISSN
1070-4272

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