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Atomic Layer Deposition of Titanium Disulfide Thin Films

✍ Scribed by V. Pore; M. Ritala; M. Leskelä

Publisher: John Wiley and Sons
Year: 2007
Tongue: English
Weight: 634 KB
Volume: 13
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.200606530

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