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Ruthenium Thin Films Grown by Atomic Layer Deposition

✍ Scribed by T. Aaltonen; P. Alén; M. Ritala; M. Leskelä

Publisher: John Wiley and Sons
Year: 2003
Tongue: English
Weight: 250 KB
Volume: 9
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.200290007

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