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Atomic Layer Deposition of Ruthenium Thin Films from Ru(thd)3 and Oxygen

✍ Scribed by T. Aaltonen; M. Ritala; K. Arstila; J. Keinonen; M. Leskelä


Publisher
John Wiley and Sons
Year
2004
Tongue
English
Weight
245 KB
Volume
10
Category
Article
ISSN
0948-1907

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