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Atomic Layer Deposition of Iron Oxide Thin Films and Nanotubes using Ferrocene and Oxygen as Precursors

✍ Scribed by Ma˚rten Rooth; Anders Johansson; Kaupo Kukli; Jaan Aarik; Mats Boman; Anders Hårsta


Publisher
John Wiley and Sons
Year
2008
Tongue
English
Weight
193 KB
Volume
14
Category
Article
ISSN
0948-1907

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