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Atomic Layer Deposition of Co3O4 Thin Films Using a CoI2/O2 Precursor Combination

✍ Scribed by M. Rooth; E. Lindahl; A. Hårsta

Publisher
John Wiley and Sons
Year
2006
Tongue
English
Weight
394 KB
Volume
12
Category
Article
ISSN
0948-1907

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