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Laser-Assisted Atomic Layer Deposition of Boron Nitride Thin Films

✍ Scribed by J. Olander; L. M. Ottosson; P. Heszler; J.-O. Carlsson; K. M. E. Larsson

Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
486 KB
Volume
11
Category
Article
ISSN
0948-1907

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## Abstract Presented in this paper is a study of the biocompatibility of an atomic layer‐deposited (ALD) alumina (Al~2~O~3~) thin film and an ALD hydrophobic coating on standard glass cover slips. The pure ALD alumina coating exhibited a water contact angle of 55° ± 5° attributed, in part, to a hi