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Atomic Layer Deposition of Tin Monosulfide Thin Films

✍ Scribed by Prasert Sinsermsuksakul; Jaeyeong Heo; Wontae Noh; Adam S. Hock; Roy G. Gordon

Publisher: John Wiley and Sons
Year: 2011
Tongue: English
Weight: 688 KB
Volume: 1
Category: Article
ISSN: 1614-6832
DOI: 10.1002/aenm.201100330

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