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Atomic layer deposition of titanium dioxide thin films from tetraethoxytitanium and water

✍ Scribed by A. P. Alekhin; G. I. Lapushkin; A. M. Markeev; A. A. Sigarev; V. F. Toknova


Book ID
110203235
Publisher
Pleiades Publishing
Year
2010
Tongue
English
Weight
325 KB
Volume
4
Category
Article
ISSN
1027-4510

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