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In situ investigation of the growth of microcrystalline silicon obtained by alternating deposition and hydrogen-etching sequences

✍ Scribed by M. Fang; J.B. Chevrier; B. Drevillon

Book ID: 117147113
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 258 KB
Volume: 137-138
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(05)80239-x

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