Hydrogen structures and the optoelectronic properties in transition films from amorphous to microcrystalline silicon prepared by hot-wire chemical vapor deposition

✍ Scribed by Han, Daxing; Wang, Keda; Owens, Jessica M.; Gedvilas, Lynn; Nelson, Brent; Habuchi, Hitoe; Tanaka, Masako

• Book ID: 120454259
• Publisher: American Institute of Physics
• Year: 2003
• Tongue: English
• Weight: 405 KB
• Volume: 93
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1555680