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Study of structural and electronic environments of hydrogenated amorphous silicon carbonitride (a-SiCN:H) films deposited by hot wire chemical vapor deposition

✍ Scribed by Bibhu P. Swain; Nong M. Hwang

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 728 KB
Volume: 254
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2008.02.077

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