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Pressure dependent structural and optical properties of silicon carbide thin films deposited by hot wire chemical vapor deposition from pure silane and methane gases

✍ Scribed by Fatemeh Shariatmadar Tehrani, Boon Tong Goh…

Book ID: 120681376
Publisher: Springer US
Year: 2012
Tongue: English
Weight: 717 KB
Volume: 24
Category: Article
ISSN: 0957-4522
DOI: 10.1007/s10854-012-0934-z

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