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Structural and optical properties of nc-3C–SiC films synthesized by hot wire chemical vapor deposition from SiH4–C2H2–H2 mixture

✍ Scribed by Honglie Shen; Tianru Wu; Yuanyuan Pan; Lei Zhang; Bin Cheng; Zhihao Yue


Book ID
118501871
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
581 KB
Volume
522
Category
Article
ISSN
0040-6090

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