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Synthesis of porous sic films by particle precipitation added chemical vapor deposition using SIH4 and C2H2

✍ Scribed by Lu-Sheng Hong; Chi-Liang Liu


Book ID
117131531
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
95 KB
Volume
29
Category
Article
ISSN
0021-8502

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