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In-situ analysis on the initial growth of ultra-thin ruthenium films with atomic layer deposition

โœ Scribed by Geidel, Marion; Junige, Marcel; Albert, Matthias; Bartha, Johann W.

Book ID
120312442
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
948 KB
Volume
107
Category
Article
ISSN
0167-9317

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