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Initial growth and properties of atomic layer deposited TiN films studied by in situ spectroscopic ellipsometry

✍ Scribed by E. Langereis; S. B. S. Heil; M. C. M. van de Sanden; W. M. M. Kessels

Publisher: John Wiley and Sons
Year: 2005
Tongue: English
Weight: 280 KB
Volume: 2
Category: Article
ISSN: 1862-6351
DOI: 10.1002/pssc.200562218

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