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In-situ RHEED study of growth processes in the initial stage of SiGe alloy film deposition by gas source molecular beam epitaxy

✍ Scribed by Y. Koide; A. Furukawa; S. Zaima; Y. Yasuda

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 522 KB
Volume: 115
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(91)90769-2

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