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The effect of growth parameters on the deposition of CaS thin films by atomic layer epitaxy

✍ Scribed by J. Rautanen; M. Leskelä; L. Niinistö; E. Nykänen; P. Soininen; M. Utriainen


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
508 KB
Volume
82-83
Category
Article
ISSN
0169-4332

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