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[IEEE International Electron Devices Meeting. Technical Digest. IEDM - San Francisco, CA, USA (10-13 Dec. 2000)] International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138) - Boron diffusion and activation in the presence of other species

✍ Scribed by Hong-Jyh Li, ; Kohli, P.; Ganguly, S.; Kirichenko, T.A.; Zeitzoff, P.; Torres, K.; Banerjee, S.

Book ID: 111942692
Publisher: IEEE
Year: 2000
Weight: 418 KB
Edition: 2000
Volume: 0
Category: Article
ISBN-13: 9780780364387
DOI: 10.1109/iedm.2000.904368

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