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[IEEE International Conference on Microelectronic Test Structures - Nara, Japan (22-25 March 1995)] Proceedings International Conference on Microelectronic Test Structures - Determination of solid solubility limit of In and Sb in Si using bonded silicon-on-insulator (SOI) substrate

✍ Scribed by Sato, A.; Suzuki, K.; Horie, H.; Sugii, T.

Book ID: 120088254
Publisher: IEEE
Year: 1995
Weight: 246 KB
Category: Article
ISBN-13: 9780780320659
DOI: 10.1109/ICMTS.1995.513984

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