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[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Superlubricity mechanism for micro electro mechanical systems

โœ Scribed by Hirano, M.; Kuwano, H.; Weijtmans, J.W.


Book ID
126603657
Publisher
IEEE
Year
1997
Weight
568 KB
Category
Article
ISBN-13
9780780337442

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