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[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - A packaged silicon MEMS vibratory gyroscope for microspacecraft

✍ Scribed by Tang, T.K.; Gutierrez, R.C.; Stell, C.B.; Vorperian, V.; Arakaki, G.A.; Rice, J.T.; Li, W.J.; Chakraborty, I.; Shcheglov, K.; Wilcox, J.Z.; Kaiser, W.J.

Book ID: 121260536
Publisher: IEEE
Year: 1997
Tongue: English
Weight: 846 KB
Category: Article
ISBN-13: 9780780337442
DOI: 10.1109/MEMSYS.1997.581911

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