𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Invar MEMS milliactuator for hard disk drive application

✍ Scribed by Hirano, T.; Long-Sheng Fan, ; Gao, J.Q.

Book ID: 120184430
Publisher: IEEE
Year: 1997
Tongue: English
Weight: 597 KB
Category: Article
ISBN-13: 9780780337442
DOI: 10.1109/MEMSYS.1997.581863

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

[IEEE IEEE The Tenth Annual Internationa

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - A packaged silicon MEMS vibratory gyroscope for microspacecraft

✍ Tang, T.K.; Gutierrez, R.C.; Stell, C.B.; Vorperian, V.; Arakaki, G.A.; Rice, J. 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 846 KB

[IEEE IEEE The Tenth Annual Internationa

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - A decade of MEMS and its future

✍ Fujita, H. 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 708 KB

[IEEE IEEE The Tenth Annual Internationa

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Touch mode capacitive pressure sensors for industrial applications

✍ Ko, W.H.; Qiang Wang, 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 505 KB

[IEEE IEEE The Tenth Annual Internationa

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Glass direct bonding technology for hermetic seal package

✍ Ando, D.; Oishi, K.; Nakamura, T.; Umeda, S. 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 604 KB

[IEEE IEEE The Tenth Annual Internationa

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - A three-dimensional shape memory alloy loop actuator

✍ Nakamura, Y.; Nakamura, S.; Buchaillot, L.; Fujita, H. 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 441 KB

[IEEE IEEE The Tenth Annual Internationa

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Surface micromachined linear electrostatic stepper motor

✍ Tas, N.R.; Sonnenberg, A.H.; Sander, A.F.M.; Elwenspoek, M.C. 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 925 KB