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[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Surface micromachined linear electrostatic stepper motor

✍ Scribed by Tas, N.R.; Sonnenberg, A.H.; Sander, A.F.M.; Elwenspoek, M.C.

Book ID: 120195252
Publisher: IEEE
Year: 1997
Tongue: English
Weight: 925 KB
Category: Article
ISBN-13: 9780780337442
DOI: 10.1109/MEMSYS.1997.581806

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